Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/08/2008
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Application #:
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11243407
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Filing Dt:
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10/04/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Inventors:
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Russell Hudyma, Hans-Jurgen Mann, Udo Dinger
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Title:
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PROJECTION SYSTEM FOR EUV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY 73447 |
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OHLANDT, GREELEY, RUGGIERO & PERLE |
ONE LANDMARK SQUARE |
10TH FLOOR |
STAMFORD, CT 06901 |
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Assignment:
2
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RUDOLF-EBER-STRASSE 2 |
73447 OBERKOCHEN, GERMANY |
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TIMOTHY A. FRENCH |
FISH & RICHARDSON P.C. |
ONE MARINA PARK DRIVE |
BOSTON, MASSACHUSETTS 02210-1878 |
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