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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10944491
Filing Dt:
09/17/2004
Publication #:
Pub Dt:
03/23/2006
Inventors:
David W. Minsek, David D. Bernhard, Thomas H. Baum
Title:
Composition and process for ashless removal of post-etch photoresist and/or bottom anti-reflective material on a substrate
Assignment: 1
Reel/Frame:
015523/0135Recorded: 01/04/2005Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/17/2004
Exec Dt:
11/17/2004
Exec Dt:
11/18/2004
Assignee:
7 COMMERCE DRIVE
DANBURY, CONNECTICUT 06810
Correspondent:
ADVANCED TECHNOLOGY MATERIALS, INC.
MARGARET CHAPPUIS
7 COMMERCE DRIVE
DANBURY, CT 06810

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