Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10953708
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Filing Dt:
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09/29/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Inventor:
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William W. Dostalik
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Title:
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METHOD FOR ETCH-STOP LAYER ETCHING DURING DAMASCENE DIELECTRIC ETCHING WITH LOW POLYMERIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 655474, MS 3999 |
| DALLAS, TEXAS 75265 |
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| TEXAS INSTRUMENTS INCORPORATED |
| PETER MCLARTY |
| P.O. BOX 655474; MS 3999 |
| DALLAS, TEXAS 75265 |
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