Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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10964814
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Filing Dt:
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10/15/2004
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Publication #:
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Pub Dt:
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04/20/2006
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Inventors:
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Erik Marie Jose Smeets, Fransiscus Godefridus Casper Bijnen et al
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Title:
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MEASUREMENT SUBSTRATE, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, METHOD OF CALCULATING AN ANGLE OF AN ALIGNMENT BEAM OF AN ALIGNMENT SYSTEM, AND ALIGNMENT VERIFICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP LLP |
| P.O. BOX 10500 |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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