Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10974003
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Filing Dt:
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10/26/2004
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Publication #:
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Pub Dt:
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04/27/2006
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Inventors:
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Aaron Hunter, Rajesh S. Ramanujam, Balasubramanian Ramachandran, Cornia Elena Tanasa et al
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Title:
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METHOD AND APPARATUS FOR LOW TEMPERATURE PYROMETRY USEFUL FOR THERMALLY PROCESSING SILICON WAFERS
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
PATENT COUNSEL, LEGAL AFFAIRS DEPT. |
P.O. BOX 450-A |
SANTA CLARA, CA 95052 |
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