Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10980172
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Filing Dt:
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11/04/2004
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Publication #:
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Pub Dt:
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05/04/2006
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Inventor:
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Eric J. Strang
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Title:
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Method and apparatus for atomic layer deposition
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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