Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11023862
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Filing Dt:
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12/28/2004
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Publication #:
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Pub Dt:
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06/29/2006
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Inventors:
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Sarah J. Lane, Andrew Scott Lawing, Brian L. Mueller, Charles Yu
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Title:
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MULTI-STEP METHODS FOR CHEMICAL MECHANICAL POLISHING SILICON DIOXIDE AND SILICON NITRIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1105 NORTH MARKET STREET, SUITE 1300 |
| WILMINGTON, DELAWARE 19899 |
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| EDWIN OH |
| ROHM AND HAAS ELECTRONIC MATERIALS |
| CMP HOLDINGS, INC. |
| 1105 NORTH MARKET STREET, SUITE 1300 |
| WILMINGTON, DE 19899 |
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