Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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11044857
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Filing Dt:
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01/26/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Inventors:
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Fei-Yun Chen, Ni-Hwi Kuan, Yuh-Hwa Chang, Yuan-Pang Lee, Yuan-Ko Hwang, Shuh-Shun Chen
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Title:
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METHOD TO AVOID AMORPHOUS-SI DAMAGE DURING WET STRIPPING PROCESSES IN THE MANUFACTURE OF MEMS DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 R.O.C. |
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| WILLIAM H. MURRAY, ESQUIRE |
| DUANE MORRIS LLP |
| ONE LIBERTY PLACE |
| PHILADELPHIA, PA 19103 |
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