Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2008
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Application #:
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11317230
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Filing Dt:
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12/27/2005
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Publication #:
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Pub Dt:
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08/03/2006
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Inventors:
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Willem Herman Koenen, Arthur Winfried Eduardus Minnaert, Luberthus Ouwehand et al
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Title:
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LITHOGRAPHIC APPARATUS AND METHOD FOR DETERMINING Z POSITION ERRORS/VARIATIONS AND SUBSTRATE TABLE FLATNESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW ET AL. |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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