Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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11328688
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Filing Dt:
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01/10/2006
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Publication #:
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Pub Dt:
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08/10/2006
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Inventors:
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Thorsten Hanewald, Andreas Hauser, Kai-Olaf Subke, Ingold Janssen
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Title:
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SYSTEM AND METHOD FOR ANISOTROPICALLY ETCHING A RECESS IN A SILICON SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| 81669 MUNICH, GERMANY |
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| BRINKS HOHER GILSON & LIONE |
| P.O. BOX 10395 |
| CHICAGO, IL 60610 |
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