Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11190119
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Filing Dt:
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07/25/2005
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Publication #:
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Pub Dt:
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08/17/2006
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Inventors:
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Alton H. Phillips, Douglas C. Watson, Hiroyuki Kondo
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Title:
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Lithographic-optical systems including isolatable vacuum chambers, and lithography apparatus comprising same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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FUJI BLDG., 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO, JAPAN 100 |
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DONALD L. STEPHENS JR. |
KLARQUIST SPARKMAN, LLP |
ONE WORLD TRADE CENTER, SUITE 1600 |
121 S.W. SALMON STREET |
PORTLAND, OR 97204-2988 |
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