Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2008
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Application #:
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11349974
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Filing Dt:
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02/09/2006
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Publication #:
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Pub Dt:
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08/24/2006
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Inventors:
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Hidetoshi Nishiyama, Muneyuki Fukuda, Noritsugu Takahashi, Mitsugu Sato, Atsuko Fukada et al
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Title:
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INSPECTION METHOD AND INSPECTION APPARATUS USING CHARGED PARTICLE BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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