Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11066902
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Filing Dt:
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02/25/2005
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Publication #:
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Pub Dt:
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08/31/2006
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Inventors:
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William Roberts, Christopher Gould
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Title:
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AUTOMATED FOCUS FEEDBACK FOR OPTICAL LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6000 TECHNOLOGY BOULEVARD |
| SANDSTON, VIRGINIA 23150 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6000 TECHNOLOGY BOULEVARD |
| SANDSTON, VIRGINIA 23150 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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