Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11363358
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Filing Dt:
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02/27/2006
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Publication #:
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Pub Dt:
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09/07/2006
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Inventors:
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Norbert W. Elsdoerfer, Olga V. Mikulina, Abdellah Mourchid
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Title:
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Apparatus and method for controlling temperature in a chuck system
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4 COMMERCIAL STREET |
SHARON, MASSACHUSETTS 02067-1653 |
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STEVEN M. MILLS |
MILLS & ONELLO LLP |
ELEVEN BEACON STREET, SUITE 605 |
BOSTON, MASSACHUSETTS 02108 |
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