Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/27/2009
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Application #:
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11276780
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Filing Dt:
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03/14/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Inventors:
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Keiji Ohshima, Takahiro Saito, Kazunori Nagahata
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Title:
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PLASMA TREATMENT METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-35 KITASHINAGAWA |
SHINAGAWA-KU, TOKYO, JAPAN |
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SONNENSCHEIN NATH & ROSENTHAL LLP |
POST OFFICE BOX 061080 |
WACKER DRIVE STATION, SEARS TOWER |
CHICAGO, IL 60606-1080 |
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