Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2007
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Application #:
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11099119
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Filing Dt:
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04/05/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Inventors:
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Joseph C. Olson, Eric D. Hermanson, Rosario Mollica, Paul J. Murphy
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Title:
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METHODS AND APPARATUS FOR ION BEAM ANGLE MEASUREMENT IN TWO DIMENSIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| MARK SUPERKO |
| VARIAN SEMICONDUCTOR EQUIPMENT |
| ASSOCIATES, INC. |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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