Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11097737
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Filing Dt:
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04/02/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Inventors:
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Yu-Hsi Wang, Tsai-Sheng Gau, Chih-Ming Ke, Shinn-Sheng Yu, Jacky Huang
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Title:
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Integrated optical metrology and lithographic process track for dynamic critical dimension control
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8. LI-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C. |
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| RANDY W. TUNG |
| TUNG & ASSOCIATES |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MICHIGAN 48302 |
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