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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7443948
Issue Dt:
10/28/2008
Application #:
11345880
Filing Dt:
02/02/2006
Publication #:
20060245540
Pub Dt:
11/02/2006
Inventors:
Jorg Schultz, Johannes Wangler, Joachim Hainz, Karl-Heinz Schuster, Udo Dinger et al
Title:
ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
Assignment: 1
Reel/Frame:
018054/0550Recorded: 08/03/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SCHULTZ, JORG
Exec Dt:
08/12/2002
WANGLER, JOHANNES
Exec Dt:
08/13/2002
SCHUSTER, KARL-HEINZ
Exec Dt:
08/08/2002
DINGER, UDO
Exec Dt:
08/22/2002
SINGER, WOLFGANG
Exec Dt:
08/09/2002
ANTONI, MARTIN
Exec Dt:
08/07/2002
WIETZORRECK, JOACHIM
Exec Dt:
08/15/2002
HAINZ, JOACHIM
Exec Dt:
08/12/2002
Assignee:
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondent:
OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901
Assignment: 2
Reel/Frame:
018687/0203Recorded: 08/03/2006Pages: 5
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Exec Dt:
08/27/2002
Assignee:
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22
OBERKOCHEN, GERMANY 73447
Correspondent:
OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901

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