Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11147531
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Filing Dt:
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06/08/2005
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Publication #:
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Pub Dt:
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12/14/2006
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Inventors:
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Yuchun Wang, Fred F. Sun, Joseph D. Hawkins
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Title:
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Polishing composition and method for defect improvement by reduced particle stiction on copper surface
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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| STEVEN WESEMAN, ESQ. |
| ASSOCIATE GENERAL COUNSEL, IP |
| CABOT MICROELECTRONICS CORPORATION |
| 870 NORTH COMMONS DRIVE |
| AURORA, IL 60504 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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| STEVEN WESEMAN, ESQ. |
| ASSOCIATE GENERAL COUNSEL, IP |
| CABOT MICROELECTRONICS CORPORATION |
| 870 NORTH COMMONS DRIVE |
| AURORA, IL 60504 |
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