Patent Assignment Abstract of Title
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For pending or abandoned applications please consult USPTO staff.
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11396823
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Filing Dt:
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04/03/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Inventors:
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Bipin S. Parekh, Robert S. Zeller, Russell J. Holmes, Jeffrey J. Spiegelman
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Title:
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Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 3500 LYMAN BOULEVARD |
| CHASKA, MINNESOTA 55318 |
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| TIMOTHY J. KING |
| 129 CONCORD ROAD |
| ENTEGRIS, INC. |
| BILLERICA, MA 01821-4600 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3500 LYMAN BOULEVARD |
| CHASKA, MINNESOTA 55318 |
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| ALLCE O. CARROLL, ESQ. |
| HAMILTON, BROOK, SMITH & REYNOLDS, P.C. |
| 530 VIRGINIA ROAD, P.O. BOX 9133 |
| CONCORD, MA 01742-9133 |
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