Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11178856
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Filing Dt:
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07/10/2005
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Publication #:
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Pub Dt:
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12/21/2006
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Inventor:
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Arun Ananth Aiyer
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Title:
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METHOD FOR MONITORING FILM THICKNESS USING HETERODYNE REFLECTOMETRY AND GRATING INTERFEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2901 EISENHOWER STREET |
| CARROLLTON, TEXAS 75007 |
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| RUDOLPH J. BUCHEL, JR. |
| RUDOLPH J. BUCHEL, JR., P.C. |
| P.O. BOX 702526 |
| DALLAS, TX 75370-2526 |
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