Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/26/2013
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Application #:
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10549283
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Filing Dt:
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06/21/2006
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Publication #:
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Pub Dt:
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01/04/2007
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Inventors:
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Yasunori Hatamura, Kunihiko Hinata
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Title:
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METHOD AND APPARATUS FOR REDUCING SUBSTRATE BACKSIDE DEPOSITION DURING PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| C. IRVIN MCCLELLAND |
| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE 1ST AND 2ND ASSIGNORS EXECUTION DATES. DOCUMENT PREVIOUSLY RECORDED AT REEL 018016 FRAME 0557.
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| TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| C. IRVIN MCCLELLAND |
| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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