Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11177482
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/11/2007
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Inventors:
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Wilhelmus Petrus De Boeij, Christian Wagner
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Title:
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DIFFERENT POLARIZATION IN CROSS-SECTION OF A RADIATION BEAM IN A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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