Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11542195
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Filing Dt:
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10/04/2006
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Publication #:
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Pub Dt:
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02/08/2007
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Inventor:
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Matsunari Shuichi
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Title:
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Exposure apparatus control method, exposure method and apparatus using the control method, and device manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| MICHAEL R. KELLY |
| FINNEGAN, HENDERSON, FARABOW ET AL. |
| 901 NEW YORK AVENUE, N.W. |
| WASHINGTON, D.C. 20001-4413 |
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