Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11195620
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Filing Dt:
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08/03/2005
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Publication #:
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Pub Dt:
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02/08/2007
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Inventors:
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Ch Yang, Yi-Lung Wu, Rey-Hsing Chiang
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Title:
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Method for reducing particle contamination in a low pressure CVD apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 818 GUOSHOUJING ROAD |
| ZHANGLIANG HI-TECH PARK |
| SHANGHAI 201203, CHINA |
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| MORTON J. ROSENBERG, ESQ. |
| ROSENBERG, KLEIN & LEE |
| 3458 ELLICOTT CENTER DRIVE |
| SUITE 101 |
| ELLICOTT CITY, MD 21043 |
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