Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/06/2012
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Application #:
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11472544
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Filing Dt:
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06/22/2006
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Publication #:
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Pub Dt:
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02/08/2007
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Inventors:
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Jang Fung Chen, Duan-Fu Stephen Hsu, Douglas Van Den Broeke, Thomas Laidig
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Title:
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METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING MASK FEATURE PITCH DECOMPOSITION FOR USE IN A MULTIPLE EXPOSURE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 324 |
5500 AH VELDHOVEN, NETHERLANDS |
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MCDERMOTT WILL & EMERY LLP |
600 13TH STREET, N.W. |
WASHINGTON, D.C. 20005-3096 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL-5504 DR |
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PILLSBURY WINTHROP SHAW PITTMAN, LLP |
P.O. BOX 10500 |
MCLEAN, VA 22102 |
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