Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11210851
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Filing Dt:
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08/25/2005
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Publication #:
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Pub Dt:
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03/01/2007
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Inventors:
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Naohisa Goto, Tadahiro Ohmi, Tamotsu Morimoto
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Title:
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Microwave plasma processing apparatus utilizing a square waveguide array
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-8-1 SHIROYAMATE, HACHIOJI-SHI |
| TOKYO, JAPAN |
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| 1-1, KATAHIRA 2-CHOME, AOBA-KU, |
| SENDAI-SHI |
| MIYAGI 980-8577, JAPAN |
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| CROWELL & MORNING LLP |
| INTELLECTUAL PROPERTY GROUP |
| PO BOX 14300 |
| WASHINGTON, DC 20044-4300 |
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