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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/02/2010
Application #:
11466848
Filing Dt:
08/24/2006
Publication #:
Pub Dt:
03/01/2007
Inventor:
Yoshihiro Shiode
Title:
MEASUREMENT METHOD AND APPARATUS, AND EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
018165/0072Recorded: 08/24/2006Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/02/2006
Assignee:
3-30-2 SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN 146-8501
Correspondent:
MORGAN & FINNEGAN LLP
3 WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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