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Patent Assignment Abstract of Title

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Total Assignments: 3

Patent #:	NONE	Issue Dt:		Application #:	11225893	Filing Dt:	09/14/2005
Publication #:	20070056927	Pub Dt:	03/15/2007
Inventors:	Len Y. Tsou, Rajiv M. Ranade, George A. Kaplita, Hongwen Yan, Rich Wise, Akiteru Ko
Title:	Process and system for etching doped silicon

Assignment: 1

Reel/Frame:

017241/0650

Recorded: 11/16/2005

Pages: 2

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

KO, AKITERU

Exec Dt:

10/12/2005

Assignee:

TOKYO ELECTRON, LTD.

3-6, AKASAKA 5-CHOME

TOKYO 107-8481, JAPAN

Correspondent:

DLA PIPER RUDNICK GRAY CARY US LLP

P. O. BOX 9271

RESTON, VA 20195

Assignment: 2

Reel/Frame:

017241/0674

Recorded: 11/16/2005

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

TSOU, LEN Y.

Exec Dt:

10/14/2005

RANADE, RAJIV M.

Exec Dt:

10/28/2005

KAPLITA, GEORGE A.

Exec Dt:

10/13/2005

YAN, HONGWEN

Exec Dt:

10/14/2005

WISE, RICH

Exec Dt:

10/13/2005

Assignee:

TOKYO ELECTRON, LTD.

3-6, AKASAKA 5-CHOME

TOKYO 107-8481, JAPAN

Correspondent:

DLA PIPER RUDNIC GRAY CARY US LLP

P.O. BOX 9271

RESTON, VA 20195

Assignment: 3

Reel/Frame:

018223/0580

Recorded: 09/06/2006

Pages: 7

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE AND ASSIGNEE ADDRESS TO "INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW ORCHARD ROAD, ARMONK, NEW YORK 10504" PREVIOUSLY RECORDED ON REEL 017241 FRAME 0674. ASSIGNOR(S) HEREBY CONFIRMS THE ASISGNEE AND ADDRESS OF ASSIGNEE WERE ERRONEOUSLY LISTED AS "TOKYO ELECTRON, LTD., 3-6, AKASAKA 5-CHOME, TOKYO 107-8481, JAPAN".

Assignors:

TSOU, LEN Y.

Exec Dt:

10/14/2005