Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/30/2009
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Application #:
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11518878
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Filing Dt:
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09/12/2006
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Publication #:
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Pub Dt:
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03/15/2007
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Inventors:
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Tomoyuki Awazu, Akira Mikumo, Masuhiro Natsuhara, Hirohiko Nakata
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Title:
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HEATER UNIT AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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5-33, KITAHAMA 4-CHOME |
CHUO-KU, OSAKA-SHI |
OSAKA, JAPAN 541-0041 |
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MCDERMOTT WILL & EMERY LLP |
600 13TH STREET, N.W. |
WASHINGTON, DC 20005-3096 |
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