Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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11230386
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Filing Dt:
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09/20/2005
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Publication #:
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Pub Dt:
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03/22/2007
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Inventors:
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Khoon Peng Lim, Lai Seng Foo
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Title:
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REAL TIME MONITORING OF PARTICULATE CONTAMINATION IN A WAFER PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 1 WOODLANDS INDUSTRIAL PARK D, STREET 1 |
SINGAPORE 738799, SINGAPORE |
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GEORGE O. SAILE |
28 DAVIS AVENUE |
POUGHKEEPSIE, NY 12603 |
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