Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11465893
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Filing Dt:
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08/21/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Inventors:
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Jeffrey A. Rzepiela, Yiping Feng, Shiyou Pei, Alexander Kagan, Jianou Shi et al
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Title:
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SYSTEMS AND METHODS FOR CONTROLLING DEPOSITION OF A CHARGE ON A WAFER FOR MEASUREMENT OF ONE OR MORE ELECTRICAL PROPERTIES OF THE WAFER
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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BAKER & MCKENZIE LLP |
1114 AVENUE OF THE AMERICAS |
NEW YORK, NY 10036 |
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