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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11525813
Filing Dt:
09/25/2006
Publication #:
Pub Dt:
05/17/2007
Inventors:
Tsutomu Nakada, Makoto Kubota
Title:
Layer forming method, layer forming apparatus, workpiece processing apparatus, interconnect forming method, and substrate interconnect structure
Assignment: 1
Reel/Frame:
018343/0071Recorded: 09/25/2006Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/09/2006
Exec Dt:
06/09/2006
Assignee:
11-1, HANEDA ASAHI-CHO
OHTA-KU, TOKYO, JAPAN
Correspondent:
C. IRVIN MCCLELLAND
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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