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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
8413604
Issue Dt:
04/09/2013
Application #:
11564134
Filing Dt:
11/28/2006
Publication #:
20070113979
Pub Dt:
05/24/2007
Inventors:
Rene George, Andreas Kadavanich, Hongching Shan, Daniel J. Devine, Stephen E. Savas et al
Title:
Slotted Electrostatic Shield Modification for Improved Etch and CVD Process Uniformity
Assignment: 1
Reel/Frame:
018558/0402Recorded: 11/28/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
GEORGE, RENE
Exec Dt:
06/04/2004
KADAVANICH, ANDREAS
Exec Dt:
05/27/2004
DEVINE, DANIEL J
Exec Dt:
06/07/2004
SAVAS, STEPHEN E
Exec Dt:
06/11/2004
ZAJAC, JOHN
Exec Dt:
06/10/2004
SHAN, HONGCHING
Exec Dt:
06/21/2004
Assignee:
MATTSON TECHNOLOGY, INC
47131 BAYSIDE PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
JAY R BEYER
993 GAPTER ROAD
BOULDER, CO 80303
Assignment: 2
Reel/Frame:
046956/0348Recorded: 08/27/2018Pages: 20
Conveyance:
SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
MATTSON TECHNOLOGY, INC.
Exec Dt:
08/21/2018
Assignee:
EAST WEST BANK
2350 MISSION COLLEGE BLVD., SUITE 988
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PATTY CHENG
2625 MIDDLEFIELD ROAD, SUITE 215
PALO ALTO, CA 94306
Assignment: 3
Reel/Frame:
050582/0796Recorded: 09/30/2019Pages: 16
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
MATTSON TECHNOLOGY, INC.
Exec Dt:
09/25/2019
Assignees:
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY
FREMONT, CALIFORNIA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD.
ECONOMIC AND TECHNICAL DEVELOPMENT ZONE
BEIJING, CHINA 100176
Correspondent:
DORITY & MANNING, P.A.
POST OFFICE BOX 1449
GREENVILLE, SC 29602-1449
Assignment: 4
Reel/Frame:
055950/0452Recorded: 04/15/2021Pages: 19
Conveyance:
RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
Assignor:
EAST WEST BANK
Exec Dt:
04/15/2021
Assignee:
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PKWY
FREMONT, CALIFORNIA 94538
Correspondent:
PATTY CHENG
2625 MIDDLEFIELD RD., #215
PALO ALTO, CA 94306

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