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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11588423
Filing Dt:
10/27/2006
Publication #:
Pub Dt:
06/14/2007
Inventors:
Hisashi Gomi, Tetsuya Saito, Takashi Kakegawa, Takahisa Mase, Makoto Koizumi et al
Title:
Gas Supplying unit and substrate processing apparatus
Assignment: 1
Reel/Frame:
019023/0107Recorded: 02/14/2007Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Exec Dt:
12/15/2006
Exec Dt:
12/15/2006
Exec Dt:
01/04/2007
Assignee:
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO-TO, JAPAN
Correspondent:
SMITH, GAMBRELL & RUSSELL
1850 M STREET, N.W.
SUITE 800
WASHINGTON, DC 20036

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