Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10565612
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Filing Dt:
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07/06/2006
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Publication #:
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Pub Dt:
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06/14/2007
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Inventors:
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Bernhard Gellrich, Gerd Reisinger, Dieter Schmerek, Jens Kugler
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Title:
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MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR INTRODUCING AN IMMERSION LIQUID INTO AN IMMERSION SPACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STR. 22 |
| OBERKOCHEN, GERMANY D-73447 |
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| MICHEAL D. LAKE |
| FACTOR & LAKE, LTD. |
| 1427 W. WASHINGTON BLVD., SUITE 5G/H |
| CHICAGO, IL 60607 |
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