Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10583976
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Filing Dt:
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09/19/2006
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Publication #:
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Pub Dt:
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07/05/2007
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Inventors:
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Yeong Su Song, Sang Ryong Oh, Sheung Ki Kim, Nam Heon Kim, Young Kun Oh, Do Hyung Lee
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Title:
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Method for setting plasma chamber having an adaptive plasma source, plasma etching method using the same and manufacturing method for adaptive plasma source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1 YEONGTONG-DONG, YEONGTONG-GU |
| SUWON-SI |
| GYEONGGI-DO, KOREA, REPUBLIC OF 443-808 |
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| MORGAN & FINNEGAN LLP |
| THREE WORLD FINANCIAL CENTER |
| NEW YORK, NY 10281-2101 |
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