Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/03/2012
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Application #:
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11603698
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Filing Dt:
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11/21/2006
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Publication #:
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Pub Dt:
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07/05/2007
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Inventors:
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Sang H. Ahn, Sudha Rathi, Heraldo L. Bothelho
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Title:
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REDUCTION IN PHOTORESIST FOOTING UNDERCUT DURING DEVELOPMENT OF FEATURE SIZES OF 120NM OR LESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 1450 |
SANTA CLARA, CALIFORNIA 95052 |
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SHIRLEY L. CHURCH, ESQ. |
P.O. BOX 81146 |
SAN DIEGO, CA 92138 |
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