Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11638003
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Filing Dt:
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12/13/2006
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Publication #:
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Pub Dt:
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08/02/2007
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Inventors:
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Byeong-chu Lee, Dong-chul Heo, Mo-hyun Cho
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Title:
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Apparatus having heating portion in chemical bath for substrate wet treatment and method of heating chemical for substrate wet treatment using the apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| STEVEN M. MILLS |
| MILLS & ONELLO LLP |
| ELEVEN BEACON STREET, SUITE 605 |
| BOSTON, MA 02108 |
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