Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11671860
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Filing Dt:
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02/06/2007
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Publication #:
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Pub Dt:
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08/09/2007
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Inventors:
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Steven R. Sherman, Arthur J. Learn, Robert Michael Geffken, John J. Hautala
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Title:
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GCIB Cluster Tool Apparatus and Method of Operation
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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| DAVID W. GOMES |
| BURNS & LEVINSON LLP |
| 125 SUMMER STREET |
| BOSTON, MA 02110 |
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