Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11352047
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Filing Dt:
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02/10/2006
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Publication #:
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Pub Dt:
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08/16/2007
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Inventors:
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Michael Beck, John A. Fitzsimmons, Karl Hornik, Darryl Restaino
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Title:
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MINIMIZING LOW-K DIELECTRIC DAMAGE DURING PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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