Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11367597
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Filing Dt:
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03/06/2006
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Publication #:
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Pub Dt:
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09/20/2007
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Inventors:
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Muneo Furuse, Masanori Kadotani, Katsuji Matano, Tadayoshi Kawaguchi, Masatsugu Arai
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Title:
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Plasma etching apparatus and method for forming inner wall of plasma processing chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI SHIMBASHI, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI TERRY STOUT, ET AL. |
| 1300 NORTH 17TH ST. |
| STE. 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNOR PREVIOUSLY RECORDED ON REEL 017954, FRAME 0927. ASSIGNOR HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST.
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| 1-24-14, NISHI SHIMBASHI |
| MINATO-KU, TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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