Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11396214
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Filing Dt:
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03/30/2006
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Publication #:
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Pub Dt:
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10/04/2007
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Inventors:
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Kevin Lally, Merritt Funk, Radha Sundararajan
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Title:
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MEASURING A DAMAGED STRUCTURE FORMED ON A WAFER USING OPTICAL METROLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107 |
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PETER J. YIM |
MORRISON & FOERSTER LLP |
425 MARKET STREET |
SAN FRANCISCO, CA 94105 |
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