Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/05/2009
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Application #:
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11398761
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Filing Dt:
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04/06/2006
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Publication #:
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Pub Dt:
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10/11/2007
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Inventor:
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Willem Jurrianus Venema
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD UTILIZING A MEMS MIRROR WITH LARGE DEFLECTION USING A NON-LINEAR SPRING ARRANGEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVE., NW |
| WASHINGTON, DC 20005 |
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