Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11409127
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Inventors:
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An Chyi Wei, N. T. Lian
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Title:
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Method of performing a pressure calibration during waferless autoclean process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, LIN-HSIN ROAD |
| INTELLECTUAL PROPERTY AND LEGAL OFFICE, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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| CLARK A. JABLON, ESQUIRE |
| AKIN, GUMP, STRAUSS, HAUER & FELD, L.L.P |
| ONE COMMERCE SQUARE - 2005 MARKET STREET |
| SUITE 2200 |
| PHILADELPHIA, PA 19103 |
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