Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/31/2009
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Application #:
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11434951
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Filing Dt:
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05/16/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Inventors:
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Shing-Li Sung, Wonseok Lee, Judy Wang, Shawming Ma
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Title:
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DIELECTRIC PLASMA ETCH PROCESS WITH IN-SITU AMORPHOUS CARBON MASK WITH IMPROVED CRITICAL DIMENSION AND ETCH SELECTIVITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT., M/S 2061-LEGAL |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT M. WALLACE |
| LAW OFFICE OF ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| VENTURA, CA 93003 |
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