Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/31/2009
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Application #:
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10562207
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Filing Dt:
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09/13/2006
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Publication #:
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Pub Dt:
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11/01/2007
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Inventors:
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Masahiro Watanabe, Toshihiko Nakata, Maki Tanaka
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Title:
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THREE-DIMENSIONAL SHAPE MEASURING UNIT, PROCESSING UNIT, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU |
| TOKYO 100-8220, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET, SUITE 1800 |
| ARLINGTON, VIRGINIA 22209 |
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