Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2009
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Application #:
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11812801
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Filing Dt:
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06/21/2007
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Publication #:
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Pub Dt:
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11/08/2007
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Inventors:
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Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld et al
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Title:
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OPTIMIZED CORRECTION OF WAFER THERMAL DEFORMATIONS IN A LITHOGRAPHIC PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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