Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11423361
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Filing Dt:
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06/09/2006
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Publication #:
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Pub Dt:
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12/13/2007
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Inventors:
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Todd Arthur Luse, Roger Fremgen, William J. Miller, Adrian Celaru
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Title:
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APPARATUS AND METHODS FOR MANAGING THE TEMPERATURE OF A SUBSTRATE IN A HIGH VACUUM PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 SUNNYSIDE BOULEVARD |
| WOODBURY, NEW YORK 11797 |
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| WOOD, HERRON & EVANS, L.L.P. |
| 441 VINE STREET |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202-2917 |
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