Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11451618
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Filing Dt:
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06/13/2006
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Publication #:
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Pub Dt:
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12/13/2007
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Inventors:
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Rainer Pforr, Jens Reichelt, Mario Hennig, Thomas Mulders, Karsten Zeiler
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Title:
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Mask arrangement, optical projection system and method for obtaining grating parameters and absorption properties of a diffractive optical element
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST.-MARTIN-STR. 53 |
MUNICH, GERMANY 81669 |
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PATRICK FINNAN (EDELL, SHAPIRO & FINNAN) |
1901 RESEARCH BLVD. |
SUITE 400 |
ROCKVILLE, MD 20850 |
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